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Door operating equipment for semicondutor production equipment
반도체 제조설비용 도어개폐장치
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Vaccum door operating equipment for display production equipment
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A vertical arc rotation drive module that integrates and simplifies the driving concepts of lifting, driving and rotating
It can be used under both the vacuum pressure and atmospheric pressure applied to the upper door of all vacuum facilities of semiconductors and displays, and complex operation is simplified through vertical arc rotational drive.
Process comparison
Description
  • Hard to assemble
  • Need high proficiency of manpower
  • Difficult to keep control and professional manpower
  • Difficult to quickly organize manuals for business connection between assemblers, testers, setup companies and users, and on-site response is given priority.
  • Occure invisible costs such as work volume and time for business connection between assemblers, testers, set-ups and users
Door operating equipment for semicondutor production equipment
  • registration number 10-1874881
  • registration number 10-2420197
  • registration number 10-2439229